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Focused Ion Beam (FIB) - SEM DualBeam

  • TEM Sample Preparation

    • Site-specific sample preparation for TEM, from bulk, multilayer, thin film, particles for high-quality and high-resolution imaging and analysis.

    • Rectangle shape

    • <100nm thickness for high resolution S/TEM

  • APT Sample Preparation

    • Site-specific samples.

    • Available for non-conductive samples.

    • Needle-shaped specimens. Radius on the sharp tip does not exceed 50nm

    • Multiple samples from a single wedge lift-out.

  • FIB-SEM Cross Section Imaging

    • Sub-surface characterization is a more comprehensive understanding of the material’s structure and physical properties.

    • It is possible to mill the material with FIB and perform high-resolution SEM imaging.

  • FIB-SEM Tomography

    • Obtain information on the internal structure of solid specimens.

    • Slice and view approach allows larger scale nano-structures to be characterized.

    • Site-specific 3D imaging of sub-micron features.

  • AVIZO Reconstruction & Analysis

    • Software of AVIZO from Thermo Fisher.

    • Reconstruct sliced images into a 3D model.

    • Identify and analyze specific structures.

  • Nanoscale Prototyping

    • Software of Nanobuilder from Thermo Fisher.

    • A tool for systematic planning of construction of multi-layer nanostructures.

    • Allows accurate patterns to generate complex structures.

  • STEM Imaging (STEM3+)

    Retractable STEM 3+ detector allows immediate transmission imaging for the TEM sample.

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